Lithography Machine Mask Aligner Photo-Etching Machine
Chiyambi cha malonda
Gwero lowunikira lowunikira limatenga UV LED yochokera kunja ndi gawo lopangira gwero lowala, lokhala ndi kutentha pang'ono komanso kukhazikika kwamagetsi.
Mapangidwe ounikira opindika amakhala ndi kutentha kwabwino kwa kutentha komanso gwero lowunikira pafupi, ndipo m'malo mwa nyali ya mercury ndikukonza ndizosavuta komanso zosavuta. Yokhala ndi mabinocular dual field magnification microscope ndi 21 inch wide screen LCD, imatha kulumikizidwa
chiwonetsero chamaso kapena CCD +, cholondola kwambiri, njira yodziwika bwino komanso magwiridwe antchito abwino.
Mawonekedwe
Ndi fragment processing ntchito
Kuthamanga kolumikizana kumatsimikizira kubwereza kudzera mu sensa
Kusiyana kwa kuyanjanitsa ndi kusiyana kowonekera kumatha kukhazikitsidwa ndi digito
Kugwiritsa ntchito ophatikizidwa kompyuta + touch screen opareshoni, yosavuta ndi yabwino, wokongola ndi wowolowa manja
Kokani mbale mmwamba ndi pansi, yosavuta komanso yabwino
Thandizani kukhudzana ndi vacuum, kukhudzana kwambiri, kukhudzana ndi kukakamizidwa komanso kuyandikira pafupi
Ndi nano imprint interface ntchito
Kuwonekera kwa wosanjikiza umodzi ndi kiyi imodzi, digiri yapamwamba ya automation
Makinawa ali ndi kudalirika kwabwino komanso chiwonetsero chosavuta, makamaka choyenera kuphunzitsa, kafukufuku wasayansi ndi mafakitale m'makoleji ndi mayunivesite.
Zambiri
Kufotokozera
1. Kuwonetsedwa m'dera: 110mm × 110mm;
2. ★ Kutalika kwa mawonekedwe: 365nm;
3. Kusamvana: ≤ 1m;
4. Kuwongolera kulondola: 0.8m;
5.Kuyenda kosiyanasiyana kwa tebulo lojambulira la dongosolo loyanjanitsa liyenera kukumana: Y: 10mm;
6. Machubu akumanzere ndi kumanja a njira yolumikizira amatha kusuntha padera mu X, y ndi Z malangizo, X malangizo: ± 5mm, Y malangizo: ± 5mm ndi Z malangizo: ± 5mm;
7. Chigoba kukula: 2.5 mainchesi, 3 mainchesi, 4 mainchesi, 5 mainchesi;
8. Kukula kwachitsanzo: chidutswa, 2 ", 3", 4 ";
9. ★ Oyenera chitsanzo makulidwe: 0.5-6mm, ndipo akhoza kuthandiza 20mm zitsanzo zidutswa kwambiri (mwamakonda);
10. Mawonekedwe owonetsera: nthawi (mawonekedwe owerengera);
11. Kusafanana kwa kuyatsa: ＜ 2.5%;
12. Maikulosikopu amitundu iwiri ya CCD: makulitsidwe mandala (nthawi 1-5) + microscope cholinga mandala;
13. Kusuntha kwa chigoba chokhudzana ndi chitsanzocho chiyenera kukumana: X: 5mm; Y: 5mm; : 6 ;
14. ★ Kachulukidwe kamphamvu: > 30MW / cm2,
15. ★ Malo olumikizirana ndi malo owonekera amagwira ntchito m'masiteshoni awiri, ndipo magalimoto awiri a servo motor amasintha okha;
16. Kutsika kukhudzana ndi kuthamanga kumatsimikizira kubwereza kudzera mu sensa;
17. ★ Kusiyana kwa mayalikidwe ndi kusiyana kowonekera kutha kukhazikitsidwa ndi digito;
18. ★ Ili ndi mawonekedwe a nano komanso mawonekedwe oyandikira;
19. ★ Kukhudza chophimba ntchito;
20. Mulingo wonse: Pafupifupi 1400mm (utali) 900mm (m'lifupi) 1500mm (kutalika).
